Medium wave infrared heater for wafer

Thu, 25 Jun 2026 04:25:24 +0800

On a 300mm line, a 0.5°C drift in bake temperature is enough to nudge critical dimensions, and a particle spike can kill an entire lot. Medium wave infrared heaters cut that thermal uncertainty out of soft bake and hard bake—those steps where photoresist behavior is set and repeatability is the only acceptable setting. What matters under the hood Medium wave IR dumps energy straight into the wafer, fast, with minimal overshoot. We hold wafer-level uniformity within ±0.1°C across the process window, so every soft bake and hard bake lands inside the thermal budget without edge-of-spec excursions. Cleanroom Class 1–100 isn’t an afterthought—low-outgassing materials, sealed interfaces, and a heater design that doesn’t shed particles during operation are baked in. Resist bake profiles stay stable, and the system repeats them shift after shift. Why this plays well in lithography and resist processing The payoff is measurable. Tighter temperature control means less rework, higher yield, and shorter qualification cycles. The rapid thermal response lets you tighten bake steps without blowing the profile, so you cut energy draw and pick up throughput. Reliability is built for continuous duty: these units run 7×24 with no unplanned downtime, and extended service intervals keep spares consumption down. Repeatability stops being something you chase and becomes the baseline. Here are the practical details you need Medium wave IR is excellent for fast, uniform wafer heating, but it needs precise thermal coupling and controlled ambient conditions to hold ±0.1°C. Installation has to match the tool’s chamber geometry, wafer holder, and exhaust strategy—misalign even a little and you’ll see localized gradients. Plan for cleanroom-compatible mounting, and confirm your bake stations can take the IR window and the sensor interface. When everything lines up, you get stable bake performance that keeps the line moving.

Wave on Infrared Heat Limited

Medium wave infrared heater for wafer